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Depth profile and lattice location analysis of Sb atoms in Si/Sb(-doped)/Si(001) structures using medium-energy ion scattering spectroscopy

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Kobayashi, T., McConville, C. F. (Chris F.), Dorenbos, G., Iwaki, M. and Aono, M.. (1999) Depth profile and lattice location analysis of Sb atoms in Si/Sb(-doped)/Si(001) structures using medium-energy ion scattering spectroscopy. Applied Physics Letters, Vol.74 (No.5). pp. 673-675. ISSN 0003-6951

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Official URL: http://dx.doi.org/10.1063/1.122983

Abstract

Medium-energy coaxial impact-collision ion scattering spectroscopy has been used to study the depth profile and lattice location of Sb atoms in Si/Sb(delta-doped)/Si(001) structures prepared by solid phase epitaxy. The Sb atoms are observed to diffuse into the Si capping layer at concentrations much higher than the solubility limit in a Si crystal. In addition, the concentration of diffused Sb atoms does not show a monotonic decrease with increasing distance from the delta-layer plane. The lattice locations of the diffused Sb atoms are found to be strongly dependent on the distance from the location of the original Sb delta layer.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics
Divisions:	Faculty of Science > Physics
Library of Congress Subject Headings (LCSH):	Silicon compounds, Semiconductors -- Junctions, Antimony, Annealing of metals
Journal or Publication Title:	Applied Physics Letters
Publisher:	American Institute of Physics
ISSN:	0003-6951
Date:	1 February 1999
Volume:	Vol.74
Number:	No.5
Page Range:	pp. 673-675
Identification Number:	10.1063/1.122983
Status:	Peer Reviewed
Access rights to Published version:	Open Access
References:	# T. Kobayashi, S. Shimoda, M. Iwaki, and M. Aono, RIKEN Rev. 12, 33 (1996). # T. Kobayashi, T. Utiyama, K. Takagi, M. Iwaki, and M. Aono, Abstracts of the 12th International Vacuum Congress (IVC-12) and the 8th International Conference on Solid Surfaces (ICSS-8), The Hague, Oct., 1992, SS-ThP31. # T. Kobayashi, T. Utiyama, K. Takagi, M. Iwaki, and M. Aono, Abstracts of the 53rd Autumn Meeting of the Jpn. Soc. Appl. Phys., Suita, Sept., 1992, 18pZW10. # T. Kobayashi, G. Dorenbos, M. Iwaki, and M. Aono (unpublished). # T. Kobayashi, G. Dorenbos, S. Shimoda, M. Iwaki, and M. Aono, Nucl. Instrum. Methods Phys. Res. B 118, 584 (1996). # J. F. Zieglar, Helium Stopping Powers and Ranges in All Element Matter, Stopping and Ranges of Ions in Matter (Pergamon, New York, 1977), Vol. 4. # F. A. Trumbore, Bell Syst. Tech. J. 39, 205 (1960). # O. J. Marsh, J. W. Mayer, G. A. Shifrin, and D. Jamba, Appl. Phys. Lett. 11, 92 (1967). # J. A. Davies, J. Denhartog, L. Eriksson, and J. W. Mayer, Can. J. Phys. 45, 4053 (1967).
URI:	http://wrap.warwick.ac.uk/id/eprint/1002