The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions
UNSPECIFIED (2003) The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NARA, JAPAN, NOV 11-16, 2001. Published in: Surface Science, 203 pp. 130-133.Full text not available from this repository.
Several SiGe alloys of various compositions were bombarded with ultra-low-energy primary ions, and the energy spectra of the resulting secondary ions were studied. We report here on the effects of alloy composition and primary ion beam energy on the spectra. It was found that the shape of the Si+ and Ge+ energy spectra are strongly dependent on the Ge fraction. The high energy tail on the spectra increases with Ge alloy percentage, whilst the peak position remains the same regardless of sample composition, primary beam energy or the mass of the secondary ion. It was also found that for low primary beam energies there is a narrowing of the atomic energy spectra so that atomic and molecular characteristics are indistinguishable. (C) 2002 Elsevier Science B.V. All rights reserved.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||Q Science > QD Chemistry
T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
|Journal or Publication Title:||Surface Science|
|Publisher:||ELSEVIER SCIENCE BV|
|Official Date:||15 January 2003|
|Number of Pages:||4|
|Page Range:||pp. 130-133|
|Title of Event:||13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)|
|Location of Event:||NARA, JAPAN|
|Date(s) of Event:||NOV 11-16, 2001|
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