UNSPECIFIED (2003) Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NOV 11-16, 2001, NARA, JAPAN.

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Abstract

The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs+ at glancing impact angles. The deterioration was eliminated for 1 keV Cs+ at 60degrees using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics
Journal or Publication Title:	Surface Science
Publisher:	ELSEVIER SCIENCE BV
ISSN:	0169-4332
Date:	15 January 2003
Volume:	203
Number of Pages:	4
Page Range:	pp. 260-263
Publication Status:	Published
Title of Event:	13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)
Location of Event:	NARA, JAPAN
Date(s) of Event:	NOV 11-16, 2001
URI:	http://wrap.warwick.ac.uk/id/eprint/10110

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