Skip to content Skip to navigation
University of Warwick
  • Study
  • |
  • Research
  • |
  • Business
  • |
  • Alumni
  • |
  • News
  • |
  • About

University of Warwick
Publications service & WRAP

Highlight your research

  • WRAP
    • Home
    • Search WRAP
    • Browse by Warwick Author
    • Browse WRAP by Year
    • Browse WRAP by Subject
    • Browse WRAP by Department
    • Browse WRAP by Funder
    • Browse Theses by Department
  • Publications Service
    • Home
    • Search Publications Service
    • Browse by Warwick Author
    • Browse Publications service by Year
    • Browse Publications service by Subject
    • Browse Publications service by Department
    • Browse Publications service by Funder
  • Help & Advice
University of Warwick

The Library

  • Login
  • Admin

Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal

Tools
- Tools
+ Tools

Kelly, J. H., Dowsett, M. G., Augustus, P. and Beanland, R. (2003) Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), Nara, Japan, 11-16 Nov 2001. Published in: Surface Science, Volume 203 pp. 260-263. ISSN 0169-4332.

Research output not available from this repository.

Request-a-Copy directly from author or use local Library Get it For Me service.

Official URL: http://dx.doi.org/10.1016/S0169-4332(02)00639-6

Request Changes to record.

Abstract

The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs+ at glancing impact angles. The deterioration was eliminated for 1 keV Cs+ at 60degrees using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type: Conference Item (Paper)
Subjects: Q Science > QD Chemistry
T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
Divisions: Faculty of Science, Engineering and Medicine > Science > Physics
Journal or Publication Title: Surface Science
Publisher: Elsevier BV
ISSN: 0169-4332
Official Date: 15 January 2003
Dates:
DateEvent
15 January 2003Published
Volume: Volume 203
Number of Pages: 4
Page Range: pp. 260-263
Status: Peer Reviewed
Publication Status: Published
Conference Paper Type: Paper
Title of Event: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)
Type of Event: Conference
Location of Event: Nara, Japan
Date(s) of Event: 11-16 Nov 2001

Data sourced from Thomson Reuters' Web of Knowledge

Request changes or add full text files to a record

Repository staff actions (login required)

View Item View Item
twitter

Email us: wrap@warwick.ac.uk
Contact Details
About Us