Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal
UNSPECIFIED (2003) Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NARA, JAPAN, NOV 11-16, 2001. Published in: Surface Science, 203 pp. 260-263.Full text not available from this repository.
The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs+ at glancing impact angles. The deterioration was eliminated for 1 keV Cs+ at 60degrees using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm. (C) 2002 Elsevier Science B.V. All rights reserved.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||Q Science > QD Chemistry
T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
|Journal or Publication Title:||Surface Science|
|Publisher:||ELSEVIER SCIENCE BV|
|Date:||15 January 2003|
|Number of Pages:||4|
|Page Range:||pp. 260-263|
|Title of Event:||13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)|
|Location of Event:||NARA, JAPAN|
|Date(s) of Event:||NOV 11-16, 2001|
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