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Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal
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Kelly, J. H., Dowsett, M. G., Augustus, P. and Beanland, R. (2003) Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), Nara, Japan, 11-16 Nov 2001. Published in: Surface Science, Volume 203 pp. 260-263. ISSN 0169-4332.
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Official URL: http://dx.doi.org/10.1016/S0169-4332(02)00639-6
Abstract
The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs+ at glancing impact angles. The deterioration was eliminated for 1 keV Cs+ at 60degrees using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm. (C) 2002 Elsevier Science B.V. All rights reserved.
| Item Type: | Conference Item (Paper) | ||||
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| Subjects: | Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Journal or Publication Title: | Surface Science | ||||
| Publisher: | Elsevier BV | ||||
| ISSN: | 0169-4332 | ||||
| Official Date: | 15 January 2003 | ||||
| Dates: |
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| Volume: | Volume 203 | ||||
| Number of Pages: | 4 | ||||
| Page Range: | pp. 260-263 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII) | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Nara, Japan | ||||
| Date(s) of Event: | 11-16 Nov 2001 |
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