UNSPECIFIED (2003) On determining accurate positions, separations, and internal profiles for delta layers. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NOV 11-16, 2001, NARA, JAPAN.

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Abstract

We discuss the factors affecting estimates of the true depth of sharp features such as delta layers from their responses in SIMS depth profiles. We show that the apparent position of the centroid (or peak) is strongly dependent on the interval between deltas, and examine response coalscence as a function of beam energy. The peak-to-valley ratio in the coalesced response for two adjacent deltas must be >50 before parameters such as energy-dependent profile shifts can be established with sufficient accuracy. Similarly, the sampling density must yield >10-15 data points over the top three resolved orders of magnitude. Finally we show that a delta layer structure characterized by TEM provides very accurate depth calibration. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics
Journal or Publication Title:	Surface Science
Publisher:	ELSEVIER SCIENCE BV
ISSN:	0169-4332
Date:	15 January 2003
Volume:	203
Number of Pages:	4
Page Range:	pp. 273-276
Publication Status:	Published
Title of Event:	13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)
Location of Event:	NARA, JAPAN
Date(s) of Event:	NOV 11-16, 2001
URI:	http://wrap.warwick.ac.uk/id/eprint/10111

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