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On determining accurate positions, separations, and internal profiles for delta layers

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Dowsett, M. G., Kelly, J. H., Rowlands, G. (George), Ormsby, T. J., Guzman, B., Augustus, P. and Beanland, R. (2003) On determining accurate positions, separations, and internal profiles for delta layers. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), Nara, Japan, 11-16 Nov 2001. Published in: Surface Science, Volume 203 pp. 273-276. ISSN 0169-4332. doi:10.1016/S0169-4332(02)00646-3

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Official URL: http://dx.doi.org/10.1016/S0169-4332(02)00646-3

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Abstract

We discuss the factors affecting estimates of the true depth of sharp features such as delta layers from their responses in SIMS depth profiles. We show that the apparent position of the centroid (or peak) is strongly dependent on the interval between deltas, and examine response coalscence as a function of beam energy. The peak-to-valley ratio in the coalesced response for two adjacent deltas must be >50 before parameters such as energy-dependent profile shifts can be established with sufficient accuracy. Similarly, the sampling density must yield >10-15 data points over the top three resolved orders of magnitude. Finally we show that a delta layer structure characterized by TEM provides very accurate depth calibration. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type: Conference Item (Paper)
Subjects: Q Science > QD Chemistry
T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
Divisions: Faculty of Science > Physics
Journal or Publication Title: Surface Science
Publisher: Elsevier BV
ISSN: 0169-4332
Official Date: 15 January 2003
Dates:
DateEvent
15 January 2003Published
Volume: Volume 203
Number of Pages: 4
Page Range: pp. 273-276
DOI: 10.1016/S0169-4332(02)00646-3
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access
Conference Paper Type: Paper
Title of Event: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)
Type of Event: Conference
Location of Event: Nara, Japan
Date(s) of Event: 11-16 Nov 2001

Data sourced from Thomson Reuters' Web of Knowledge

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