UNSPECIFIED (2003) A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NOV 11-16, 2001, NARA, JAPAN.

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Abstract

A floating low energy gun (FLEG) has been developed for charge neutralization in the SIMS analysis of insulating specimens. The FLEG has been characterized, and its effectiveness at low beam energies on fragile insulating samples has been compared with the performance of conventional electron guns. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics
Journal or Publication Title:	Surface Science
Publisher:	ELSEVIER SCIENCE BV
ISSN:	0169-4332
Date:	15 January 2003
Volume:	203
Number of Pages:	5
Page Range:	pp. 343-347
Publication Status:	Published
Title of Event:	13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)
Location of Event:	NARA, JAPAN
Date(s) of Event:	NOV 11-16, 2001
URI:	http://wrap.warwick.ac.uk/id/eprint/10112

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