A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications
UNSPECIFIED (2003) A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications. In: 13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII), NOV 11-16, 2001, NARA, JAPAN.Full text not available from this repository.
A floating low energy gun (FLEG) has been developed for charge neutralization in the SIMS analysis of insulating specimens. The FLEG has been characterized, and its effectiveness at low beam energies on fragile insulating samples has been compared with the performance of conventional electron guns. (C) 2002 Elsevier Science B.V. All rights reserved.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||Q Science > QD Chemistry
T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
|Journal or Publication Title:||Surface Science|
|Publisher:||ELSEVIER SCIENCE BV|
|Date:||15 January 2003|
|Number of Pages:||5|
|Page Range:||pp. 343-347|
|Title of Event:||13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII)|
|Location of Event:||NARA, JAPAN|
|Date(s) of Event:||NOV 11-16, 2001|
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