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Atomic hydrogen cleaning of GaSb(001) surfaces
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Bell, Gavin R. and McConville, C. F. (Chris F.) (1996) Atomic hydrogen cleaning of GaSb(001) surfaces. Applied Physics Letters, Vol.69 (No.18). pp. 2695-2697. doi:10.1063/1.117681 ISSN 0003-6951.
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Official URL: http://dx.doi.org/10.1063/1.117681
Abstract
We show that the (001) surface of GaSb can be cleaned efficiently by exposure to atomic hydrogen at substrate temperatures in the range 400–470 °C. This treatment removes carbon and oxygen contamination, leaving a clean, ordered surface with a symmetric (1 × 3) reconstruction after a total H2 dose of approximately 150 kL. An ordered but partially oxidized surface is generated during cleaning, and the removal of this residual oxide is the most difficult part of the process. Auger electron spectroscopy and low energy electron diffraction were used to monitor the chemical cleanliness and the ordering of the surface during the cleaning process, whereas high resolution electron energy loss spectroscopy was used to probe the electronic structure in the near-surface region. The results obtained indicates that this cleaning procedure leaves no residual electronic damage in the near-surface region of the Te-doped (n ~ 5 × 1017 cm – 3) samples of GaSb(001) studied.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
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| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Library of Congress Subject Headings (LCSH): | Gallium arsenide semiconductors, Semiconductors -- Defects, Atomic hydrogen, Electron energy loss spectroscopy, Low energy electron diffraction | ||||
| Journal or Publication Title: | Applied Physics Letters | ||||
| Publisher: | American Institute of Physics | ||||
| ISSN: | 0003-6951 | ||||
| Official Date: | 28 October 1996 | ||||
| Dates: |
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| Volume: | Vol.69 | ||||
| Number: | No.18 | ||||
| Page Range: | pp. 2695-2697 | ||||
| DOI: | 10.1063/1.117681 | ||||
| Status: | Peer Reviewed | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Funder: | Royal Society (Great Britain), Engineering and Physical Sciences Research Council (EPSRC) | ||||
| Grant number: | RSRG/16236 (RS) |
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