Bell, Gavin R. and McConville, C. F. (Chris F.). (1996) Atomic hydrogen cleaning of GaSb(001) surfaces. Applied Physics Letters, Vol.69 (No.18). pp. 2695-2697. ISSN 0003-6951

Preview

PDF WRAP_Bell_atomic_hydrogen.pdf - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader Download (80Kb)

Abstract

We show that the (001) surface of GaSb can be cleaned efficiently by exposure to atomic hydrogen at substrate temperatures in the range 400–470 °C. This treatment removes carbon and oxygen contamination, leaving a clean, ordered surface with a symmetric (1 × 3) reconstruction after a total H2 dose of approximately 150 kL. An ordered but partially oxidized surface is generated during cleaning, and the removal of this residual oxide is the most difficult part of the process. Auger electron spectroscopy and low energy electron diffraction were used to monitor the chemical cleanliness and the ordering of the surface during the cleaning process, whereas high resolution electron energy loss spectroscopy was used to probe the electronic structure in the near-surface region. The results obtained indicates that this cleaning procedure leaves no residual electronic damage in the near-surface region of the Te-doped (n ~ 5 × 1017 cm – 3) samples of GaSb(001) studied.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics
Divisions:	Faculty of Science > Physics
Library of Congress Subject Headings (LCSH):	Gallium arsenide semiconductors, Semiconductors -- Defects, Atomic hydrogen, Electron energy loss spectroscopy, Low energy electron diffraction
Journal or Publication Title:	Applied Physics Letters
Publisher:	American Institute of Physics
ISSN:	0003-6951
Date:	28 October 1996
Volume:	Vol.69
Number:	No.18
Page Range:	pp. 2695-2697
Identification Number:	10.1063/1.117681
Status:	Peer Reviewed
Access rights to Published version:	Restricted or Subscription Access
Funder:	Royal Society (Great Britain), Engineering and Physical Sciences Research Council (EPSRC)
Grant number:	RSRG/16236 (RS)
References:	1 T. Kikawa, I. Ochiai, and S. Takatani, Surf. Sci. 316, 238 ~1994!. 2 E. J. Petit and F. Houzay, J. Vac. Sci. Technol. B 12, 547 ~1994!. 3 E. J. Petit, F. Houzay, and J. M. Moison, Surf. Sci. 269, 902 ~1992!. 4 S. Goto, M. Yamada, and Y. Momura, Jpn. J. Appl. Phys. 1 34, L1180 ~1995!. 5 Y. J. Chun and M. Kawabe, Jpn. J. Appl. Phys. 1 32, L1085 ~1993!. 6 Y. Okada, S. Ohta, A. Kawabata, H. Shimomura, and M. Kawabe, Jpn. J. Appl. Phys. 1 33, 759 ~1994!. 7 T. C. Hasenberg, D. H. Chow, A. R. Kost, R. H. Miles, and L. West, Electron. Lett. 31, 275 ~1995!. 8 H. K. Choi and G. W. Turner, Appl. Phys. Lett. 67, 332 ~1995!. 9 D. H. Chow, R. H. Miles, T. C. Hasenberg, A. R. Kost, Y. H. Zhang, H. L. Dunlap, and L. West, Appl. Phys. Lett. 67, 3700 ~1995!. 10W. F. Micklethwaite, R. G. Fines, and D. J. Freschi, III-Vs Rev. 9, 51 ~1996!. 11 F. W. O. Da Silva, C. Raisin, M. Silgs, M. Nouaoura, and L. Lassabatere, Semicond. Sci. Technol. 4, 565 ~1989!. 12 G. E. Franklin, D. H. Rich, A. Sansavar, E. S. Hirschorn, F. M. Leibsle, T. Miller, and T.-C. Chang, Phys. Rev. B 41, 12619 ~1989!. 13M. T. Sieger, T. Miller, and T.-C. Chang, Phys. Rev. B 52, 8256 ~1995!. 14 L. H. Dubois and G. P. Schwartz, J. Vac. Sci. Technol. B 2, 101 ~1984!. 15 T. S. Jones, M. Q. Ding, N. V. Richardson, and C. F. McConville, Surf. Sci. 247, 1 ~1991!. 16 G. R. Bell, R. J. Dixon, N. S. Kaijaks, and C. F. McConville, Surf. Sci. ~to be published!. 17 EPI Application Note 1/96 ~1996!; A. Sutoh, Y. Okada, and M. Kawabe, Jpn. J. Appl. Phys. 1 34, L1379 ~1995!. 18Handbook of Auger Electron Spectroscopy, 2nd ed. ~Physical Electronics Industries, Eden Prairie, MN, 1976!. 19 Z. J. Gray-Grychowski, R. G. Egdell, B. A. Joyce, R. A. Stradling, and K. Woodbridge, Surf. Sci. 186, 482 ~1987!. 20 P. A. Thiry, J. L. Longueville, J. J. Pireaux, R. Caudano, H. Munekata, and M. Liehr, J. Vac. Sci. Technol. A 5, 603 ~1987!. 21 Y. Chen, S. Nannarone, J. Schaefer, J. C. Hermanson, and G. J. Lapeyre, Phys. Rev. B 39, 7653 ~1989!. 22 Ph. Lambin, J.-P. Vigneron, and A. A. Luca, Comput. Phys. Commun. 60, 351 ~1990!. 23 V. Polyakov, A. Elbe, and J. A. Schaefer, Appl. Phys. A 60, 567 ~1995!.
URI:	http://wrap.warwick.ac.uk/id/eprint/1024

Request changes to a record

Actions (login required)

View Item