UNSPECIFIED (2001) Micromachined capacitive transducer array for imaging in air. In: IEEE International Ultrasonic Symposium, ATLANTA, GA, OCT 07-10, 2001. Published in: 2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 pp. 929-932. ISBN 0-7803-7177-1. ISSN 1051-0117.

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Abstract

Micromachined transducer arrays for use in air have been fabricated using a low temperature process to give 1 mm square transducer elements. Cross-coupling between elements has been measured, and is due to a wave Which travels at a velocity close to that in air. Individual elements have been used to image reflecting objects in air, and to locate simple point and line reflectors. In addition, it is shown that an image of a coin can be produced, without the need for focussing in air. The resolution of such images has been estimated by scanning a single device over a step feature on a surface. A rectangular array has also been used as passive receivers to image the beam emitted by a focussed air-coupled device.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics
Series Name:	ULTRASONICS SYMPOSIUM
Journal or Publication Title:	2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2
Publisher:	IEEE
ISBN:	0-7803-7177-1
ISSN:	1051-0117
Editor:	Yuhas, DE and Schneider, SC
Official Date:	2001
Dates:	Date Event 2001 UNSPECIFIED
Number of Pages:	4
Page Range:	pp. 929-932
Publication Status:	Published
Title of Event:	IEEE International Ultrasonic Symposium
Location of Event:	ATLANTA, GA
Date(s) of Event:	OCT 07-10, 2001

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