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Surface and nanometrology, Markov and Fractal scale of size properties
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UNSPECIFIED (2002) Surface and nanometrology, Markov and Fractal scale of size properties. In: 7th International Symposium on Laser Metrology Applied to Science, Industry and Everyday Life, SEP 09-13, 2002, NOVOSIBIRSK, RUSSIA.
Full text not available from this repository.Abstract
The paper explores the effect that a reduction in the scale of size has on performance, manufacture and metrology. It is shown that there are profound changes in which sometimes the meanings of operations and parameters diverge.
| Item Type: | Conference Item (UNSPECIFIED) |
|---|---|
| Subjects: | Q Science > QC Physics |
| Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) |
| Journal or Publication Title: | SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2 |
| Publisher: | SPIE-INT SOC OPTICAL ENGINEERING |
| ISBN: | 0-8194-4686-6 |
| ISSN: | 0277-786X |
| Editor: | Chugui, YV and Bagayev, SN and Weckenmann, A and Osanna, PH |
| Date: | 2002 |
| Volume: | 4900 |
| Number: | Part 1&2 |
| Number of Pages: | 17 |
| Page Range: | pp. 691-707 |
| Publication Status: | Published |
| Title of Event: | 7th International Symposium on Laser Metrology Applied to Science, Industry and Everyday Life |
| Location of Event: | NOVOSIBIRSK, RUSSIA |
| Date(s) of Event: | SEP 09-13, 2002 |
| URI: | http://wrap.warwick.ac.uk/id/eprint/10330 |
Data sourced from Thomson Reuters' Web of Knowledge
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