Interaction of trimethyl based metalorganic precursors on InSb(100)-c(8 x 2)
UNSPECIFIED. (2002) Interaction of trimethyl based metalorganic precursors on InSb(100)-c(8 x 2). Surface Science, 515 (2-3). pp. 403-412. ISSN 0039-6028Full text not available from this repository.
High resolution electron energy loss spectroscopy and X-ray photoelectron spectroscopy have been used to investigate the adsorption behaviour and thermal decomposition of trimethylaluminium, (Me3Al), trimethylindium (Me3In) and trimethylgallium (Me3Ga) on the InSb(1 0 0)-c(8 x 2) reconstructed surface. All three precursors follow the same basic decomposition route, involving the sequential loss of Me groups from the surface and the incorporation of the group III element via a dimethyl and monomethyl intermediate. In the case of Me3Al, however, an additional decomposition route has also been identified at elevated temperatures, involving the formation of a CH2 intermediate via H abstraction from a Me group. A mechanism is proposed that accounts for these observations, taking into account the most recent structural model of the InSb(1 0 0)-c(8 x 2) surface and the different carbon-metal bond strengths of each precursor. In the case of Me3Al, the additional high temperature decomposition route and formation of surface >CH2 species occurs via an Al-C-Sb heterobridge intermediate. The strong Al-C bond suppresses complete Me ligand desorption and offers the possibility of the alternative decomposition route. (C) 2002 Elsevier Science B.V. All rights reserved.
|Item Type:||Journal Article|
|Subjects:||Q Science > QD Chemistry
Q Science > QC Physics
|Journal or Publication Title:||Surface Science|
|Publisher:||ELSEVIER SCIENCE BV|
|Official Date:||1 September 2002|
|Number of Pages:||10|
|Page Range:||pp. 403-412|
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