UNSPECIFIED (2002) The characterization of capacitive micromachined ultrasonic transducers in air. In: 1st Ultrasonics International Conference, JUL 03-05, 2001, DELFT, NETHERLANDS.

Full text not available from this repository.

Abstract

Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using I mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) R Medicine
Journal or Publication Title:	ULTRASONICS
Publisher:	ELSEVIER SCIENCE BV
ISSN:	0041-624X
Date:	May 2002
Volume:	40
Number:	1-8
Number of Pages:	7
Page Range:	pp. 477-483
Publication Status:	Published
Title of Event:	1st Ultrasonics International Conference
Location of Event:	DELFT, NETHERLANDS
Date(s) of Event:	JUL 03-05, 2001
URI:	http://wrap.warwick.ac.uk/id/eprint/10787

Data sourced from Thomson Reuters' Web of Knowledge

Request changes to a record

Actions (login required)

View Item