The characterization of capacitive micromachined ultrasonic transducers in air
UNSPECIFIED (2002) The characterization of capacitive micromachined ultrasonic transducers in air. In: 1st Ultrasonics International Conference, DELFT, NETHERLANDS, JUL 03-05, 2001. Published in: ULTRASONICS, 40 (1-8). pp. 477-483.Full text not available from this repository.
Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using I mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source. (C) 2002 Elsevier Science B.V. All rights reserved.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)
|Journal or Publication Title:||ULTRASONICS|
|Publisher:||ELSEVIER SCIENCE BV|
|Official Date:||May 2002|
|Number of Pages:||7|
|Page Range:||pp. 477-483|
|Title of Event:||1st Ultrasonics International Conference|
|Location of Event:||DELFT, NETHERLANDS|
|Date(s) of Event:||JUL 03-05, 2001|
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