Dataset for: "Impact of iron on the room temperature luminescence efficiency of oxygen-containing precipitates in silicon" by Karsten Bothe, Sandra Herlufsen, John D. Murphy Accepted for publication in Semiconductor Science and Technnology on 6th February 2019. DOI: not yet available. The dataset (a single file in XLSX format) contains the data behind the figures in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.