Creating a low-cost, ultra-clean environment
UNSPECIFIED. (2002) Creating a low-cost, ultra-clean environment. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 26 (1). pp. 122-127. ISSN 0141-6359Full text not available from this repository.
This paper describes a way to create a cleanroom environment with a limited budget, which may be useful to organizations requiring small amounts of very high quality surface processing. After a brief review of some general principles, it discusses the design, including practical constraints, and installation of a small facility in the University of Warwick. Based around standard bought-in items, it achieves cleanroom Class 10 000 (ISO Class 7) with local enclosures of better than Class 10 (ISO Class 4) air quality. (C) 2001 Elsevier Science Inc. All rights reserved.
|Item Type:||Journal Article|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TS Manufactures
|Journal or Publication Title:||PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY|
|Publisher:||ELSEVIER SCIENCE INC|
|Number of Pages:||6|
|Page Range:||pp. 122-127|
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