UNSPECIFIED (2001) Silicon planar microcalorimeter employing nanostructured films. In: 11th International Conference on Solid-State Sensors and Actuators, JUN 10-14, 2001, MUNICH, GERMANY.

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Abstract

This paper reports upon the combination of a silicon micromachined micro-hotplate with a nanostructured catalytic thin film in order to create a novel, low-power, microcalorimetric gas sensor. Full 3-D numerical simulations of the micro-hotplate have been carried out and agree well with both its observed temperature distribution and operating temperature of 500 degreesC at a power consumption of 106 mW. Our experimental work on microcalorimeters with electrodeposited nanoporous catalytic films suggests that they offer several advantages over classical pellistor devices, such as lower power consumption and better reproducibility.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	R Medicine T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics Q Science > QD Chemistry
Journal or Publication Title:	TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Publisher:	SPRINGER-VERLAG BERLIN
ISBN:	3-540-42150-5
Editor:	Obermeier, E
Date:	2001
Number of Pages:	4
Page Range:	pp. 820-823
Publication Status:	Published
Title of Event:	11th International Conference on Solid-State Sensors and Actuators
Location of Event:	MUNICH, GERMANY
Date(s) of Event:	JUN 10-14, 2001
URI:	http://wrap.warwick.ac.uk/id/eprint/11415

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