Silicon planar microcalorimeter employing nanostructured films
UNSPECIFIED (2001) Silicon planar microcalorimeter employing nanostructured films. In: 11th International Conference on Solid-State Sensors and Actuators, JUN 10-14, 2001, MUNICH, GERMANY.Full text not available from this repository.
This paper reports upon the combination of a silicon micromachined micro-hotplate with a nanostructured catalytic thin film in order to create a novel, low-power, microcalorimetric gas sensor. Full 3-D numerical simulations of the micro-hotplate have been carried out and agree well with both its observed temperature distribution and operating temperature of 500 degreesC at a power consumption of 106 mW. Our experimental work on microcalorimeters with electrodeposited nanoporous catalytic films suggests that they offer several advantages over classical pellistor devices, such as lower power consumption and better reproducibility.
|Item Type:||Conference Item (UNSPECIFIED)|
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Q Science > QC Physics
Q Science > QD Chemistry
|Journal or Publication Title:||TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2|
|Number of Pages:||4|
|Page Range:||pp. 820-823|
|Title of Event:||11th International Conference on Solid-State Sensors and Actuators|
|Location of Event:||MUNICH, GERMANY|
|Date(s) of Event:||JUN 10-14, 2001|
Actions (login required)