SOI-based micro-hotplate microcalorimeter gas sensor with integrated BiCMOS transducer
UNSPECIFIED (2001) SOI-based micro-hotplate microcalorimeter gas sensor with integrated BiCMOS transducer. In: 11th International Conference on Solid-State Sensors and Actuators, MUNICH, GERMANY, JUN 10-14, 2001. Published in: TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 pp. 1688-1691.Full text not available from this repository.
In this paper we describe the design of a smart calorimetric solid-state gas sensor based on SOI technology and featuring a thin membrane realised through post-process back etching. Micro-heaters are produced from active CMOS elements (i.e. n- or p-channel MOSFETs) and isolated in a thin SOI membrane in order to permit high temperature operation (up to ca. 300 degreesC). Thermodiodes are placed on and off the micro-hotplates to measure operating and ambient temperatures. The device can be operated as a microcalorimeter when one microheater is coated with an active catalytic layer and the other with an inert material. The differential signal is then simply related to the concentration of a combustible gas in air. Full simulations of the I-V device characteristics; temperature of the membrane and transducer circuit have been carried out. The device has been fabricated at IMEC (via Europractice) employing 0.8 mum TEMIC Matra MHS D-MILL BiCMOS technology. These smart sensors feature very low power consumption, high sensitivity and low fabrication cost achieved through full CMOS integration.
|Item Type:||Conference Item (UNSPECIFIED)|
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Q Science > QC Physics
Q Science > QD Chemistry
|Journal or Publication Title:||TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2|
|Number of Pages:||4|
|Page Range:||pp. 1688-1691|
|Title of Event:||11th International Conference on Solid-State Sensors and Actuators|
|Location of Event:||MUNICH, GERMANY|
|Date(s) of Event:||JUN 10-14, 2001|
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