UNSPECIFIED (2001) Design and simulations of SOICMOS micro-hotplate gas sensors. In: EUROSENSORS XIV, AUG 27-30, 2000, COPENHAGEN, DENMARK.

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Abstract

This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with Sol CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300-350 degreesC. This makes SOI-based aas-sensing devices particularly attractive for use in handheld battery-operated gas monitors. This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent Sol membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses. (C) 2001 Elsevier Science B.V. All rights reserved.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	Q Science > QD Chemistry
Journal or Publication Title:	SENSORS AND ACTUATORS B-CHEMICAL
Publisher:	ELSEVIER SCIENCE SA
ISSN:	0925-4005
Date:	30 August 2001
Volume:	78
Number:	1-3
Number of Pages:	11
Page Range:	pp. 180-190
Publication Status:	Published
Title of Event:	EUROSENSORS XIV
Location of Event:	COPENHAGEN, DENMARK
Date(s) of Event:	AUG 27-30, 2000
URI:	http://wrap.warwick.ac.uk/id/eprint/11740

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