Design and simulations of SOICMOS micro-hotplate gas sensors
UNSPECIFIED (2001) Design and simulations of SOICMOS micro-hotplate gas sensors. In: EUROSENSORS XIV, COPENHAGEN, DENMARK, AUG 27-30, 2000. Published in: SENSORS AND ACTUATORS B-CHEMICAL, 78 (1-3). pp. 180-190.Full text not available from this repository.
This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with Sol CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300-350 degreesC. This makes SOI-based aas-sensing devices particularly attractive for use in handheld battery-operated gas monitors. This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent Sol membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses. (C) 2001 Elsevier Science B.V. All rights reserved.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||Q Science > QD Chemistry|
|Journal or Publication Title:||SENSORS AND ACTUATORS B-CHEMICAL|
|Publisher:||ELSEVIER SCIENCE SA|
|Date:||30 August 2001|
|Number of Pages:||11|
|Page Range:||pp. 180-190|
|Title of Event:||EUROSENSORS XIV|
|Location of Event:||COPENHAGEN, DENMARK|
|Date(s) of Event:||AUG 27-30, 2000|
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