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Identification of incident parameters of interference beams using angular power spectral density
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Song, Yumeng, Liu, Xianping and Tian, Yanling (2019) Identification of incident parameters of interference beams using angular power spectral density. Applied Physics Letters, 114 (24). 241902 . doi:10.1063/1.5095618 ISSN 0003-6951.
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Official URL: https://doi.org/10.1063/1.5095618
Abstract
Laser interference lithography is attracting increasing interest of researchers because of its high-efficiency and low-cost in fabrication of patterns. However, there are always operational errors in the set-up of interference systems, which have a significant effect on the final produced interference pattern. This paper has systematically investigated the influences of incident parameters including incident angle, azimuth angle and polarization angle on interference patterns. An algorithm has been proposed to extract interference fringes from complicated multi-beam interference patterns using the angular power spectral density (APSD) function. The incident parameters were calculated based on the data extracted from the APSD images. Simulations were carried out to validate the effectiveness of the proposed algorithm. 3-D periodic patterns were fabricated on silicon wafers using three-beam interference lithography. The topographies of the samples were measured using an optical profiler. Based on the established model, incident parameters of the interference system set-up were calculated. The computational results are in good agreement with the pre-set values. The results have demonstrated the validation of the developed algorithm for incident parameter identification of interference beams.
Item Type: | Journal Article | ||||||||||||
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Subjects: | Q Science > QC Physics | ||||||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||||
Library of Congress Subject Headings (LCSH): | Spectral energy distribution -- Industrial applications, Lithography | ||||||||||||
Journal or Publication Title: | Applied Physics Letters | ||||||||||||
Publisher: | American Institute of Physics | ||||||||||||
ISSN: | 0003-6951 | ||||||||||||
Official Date: | 17 June 2019 | ||||||||||||
Dates: |
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Volume: | 114 | ||||||||||||
Number: | 24 | ||||||||||||
Article Number: | 241902 | ||||||||||||
DOI: | 10.1063/1.5095618 | ||||||||||||
Status: | Peer Reviewed | ||||||||||||
Publication Status: | Published | ||||||||||||
Reuse Statement (publisher, data, author rights): | The following article has been accepted by Applied Physics Letters. After it is published, it will be found at https://aip.scitation.org/journal/apl | ||||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||||
Date of first compliant deposit: | 12 June 2019 | ||||||||||||
Date of first compliant Open Access: | 14 June 2019 | ||||||||||||
RIOXX Funder/Project Grant: |
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