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Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition
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Mahoney, Edward J. D., Mushtaq, Sohail, Ashfold, Michael N. R. and Mankelevich, Yuri A. (2019) Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition. The Journal of Physical Chemistry A, 123 (13). pp. 2544-2558. doi:10.1021/acs.jpca.8b12294 ISSN 1089-5639.
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Official URL: http://dx.doi.org/10.1021/acs.jpca.8b12294
Item Type: | Journal Article | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Chemistry | ||||
Journal or Publication Title: | The Journal of Physical Chemistry A | ||||
Publisher: | American Chemical Society | ||||
ISSN: | 1089-5639 | ||||
Official Date: | April 2019 | ||||
Dates: |
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Volume: | 123 | ||||
Number: | 13 | ||||
Page Range: | pp. 2544-2558 | ||||
DOI: | 10.1021/acs.jpca.8b12294 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Open Access (Creative Commons) |
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