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Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity
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Cai, Kunhai, Tian, Yanling, Liu, Xianping, Zhang, Dawei, Shang, Jiangkun and Shirinzadeh, Bijan (2019) Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robotics and Computer-Integrated Manufacturing, 56 . pp. 95-105. doi:10.1016/j.rcim.2018.08.007
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Official URL: http://dx.doi.org/10.1016/j.rcim.2018.08.007
| Item Type: | Journal Article | ||||||
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| Divisions: | Faculty of Science > Engineering | ||||||
| Journal or Publication Title: | Robotics and Computer-Integrated Manufacturing | ||||||
| Publisher: | Elsevier | ||||||
| ISSN: | 0736-5845 | ||||||
| Official Date: | April 2019 | ||||||
| Dates: |
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| Volume: | 56 | ||||||
| Page Range: | pp. 95-105 | ||||||
| DOI: | 10.1016/j.rcim.2018.08.007 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access |
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