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Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity

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Cai, Kunhai, Tian, Yanling, Liu, Xianping, Zhang, Dawei, Shang, Jiangkun and Shirinzadeh, Bijan (2019) Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robotics and Computer-Integrated Manufacturing, 56 . pp. 95-105. doi:10.1016/j.rcim.2018.08.007

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Official URL: http://dx.doi.org/10.1016/j.rcim.2018.08.007

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Item Type: Journal Article
Divisions: Faculty of Science > Engineering
Journal or Publication Title: Robotics and Computer-Integrated Manufacturing
Publisher: Elsevier
ISSN: 0736-5845
Official Date: April 2019
Dates:
DateEvent
April 2019Published
28 August 2018Accepted
Volume: 56
Page Range: pp. 95-105
DOI: 10.1016/j.rcim.2018.08.007
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access

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