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Superlens-enhanced laser interference lithography
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Guo, Xudong, Li, Li, Hu, Yaowei, Cao, Liang, Dong, Litong, Wang, Lu, Ding, Ran, Weng, Zhankun, Song, Zhengxun, Xu, Hongmei, Yang, Zhen, Liu, Xianping, Tian, Yanling and Wang, Zuobin (2018) Superlens-enhanced laser interference lithography. Applied Physics Express, 11 (12). 125201. doi:10.7567/APEX.11.125201 ISSN 1882-0778.
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Official URL: http://dx.doi.org/10.7567/APEX.11.125201
| Item Type: | Journal Article | ||||||
|---|---|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
| Journal or Publication Title: | Applied Physics Express | ||||||
| Publisher: | Institute of Pure and Applied Physics | ||||||
| ISSN: | 1882-0778 | ||||||
| Official Date: | December 2018 | ||||||
| Dates: |
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| Volume: | 11 | ||||||
| Number: | 12 | ||||||
| Article Number: | 125201 | ||||||
| DOI: | 10.7567/APEX.11.125201 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access |
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