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Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes

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Tello, Ghalia, Al-Jarrah, Omar Y., Yoo, Paul D., Al-Hammadi, Yousof, Muhaidat, Sami and Lee, Uihyoung (2018) Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes. IEEE Transactions on Semiconductor Manufacturing, 31 (2). pp. 315-322. doi:10.1109/TSM.2018.2825482

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Official URL: http://dx.doi.org/10.1109/TSM.2018.2825482

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Item Type: Journal Article
Divisions: Faculty of Science > WMG (Formerly the Warwick Manufacturing Group)
Journal or Publication Title: IEEE Transactions on Semiconductor Manufacturing
Publisher: IEEE Computer Society
ISSN: 0894-6507
Official Date: 2018
Dates:
DateEvent
2018Published
Volume: 31
Number: 2
Page Range: pp. 315-322
DOI: 10.1109/TSM.2018.2825482
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access

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