The Library
Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells
Tools
Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wang, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2020) Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. [Dataset]
Microsoft Excel (Excel file containing the data underpinning the figures in related article)
Data set.xlsx - Published Version Available under License Creative Commons Attribution 4.0. Download (40Kb) |
|
Plain Text (Readme file)
Read me.txt - Published Version Available under License Creative Commons Attribution 4.0. Download (704b) |
Abstract
We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.
Item Type: | Dataset | |||||||||
---|---|---|---|---|---|---|---|---|---|---|
Subjects: | Q Science > QD Chemistry T Technology > TK Electrical engineering. Electronics Nuclear engineering |
|||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | |||||||||
Type of Data: | Experimental data | |||||||||
Library of Congress Subject Headings (LCSH): | Electrolytic oxidation, Silica, Silicon, Solar cells, Silicon solar cells, Silicon solar cells -- Effect of high temperatures on, Surface chemistry | |||||||||
Publisher: | University of Warwick, School of Engineering | |||||||||
Official Date: | 25 February 2020 | |||||||||
Dates: |
|
|||||||||
Status: | Not Peer Reviewed | |||||||||
Publication Status: | Published | |||||||||
Media of Output (format): | .xlsx .txt | |||||||||
Access rights to Published version: | Open Access (Creative Commons) | |||||||||
Copyright Holders: | University of Warwick | |||||||||
Description: | -->Software required |
|||||||||
Date of first compliant deposit: | 25 February 2020 | |||||||||
Date of first compliant Open Access: | 25 February 2020 | |||||||||
RIOXX Funder/Project Grant: |
|
|||||||||
Related URLs: |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |
Downloads
Downloads per month over past year