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Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells
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Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wang, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2020) Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. [Dataset]
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Abstract
We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.
| Item Type: | Dataset | |||||||||
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| Subjects: | Q Science > QD Chemistry T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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| Divisions: | Faculty of Science > Engineering | |||||||||
| Type of Data: | Experimental data | |||||||||
| Library of Congress Subject Headings (LCSH): | Electrolytic oxidation, Silica, Silicon, Solar cells, Silicon solar cells, Silicon solar cells -- Effect of high temperatures on, Surface chemistry | |||||||||
| Publisher: | School of Engineering | |||||||||
| Official Date: | 25 February 2020 | |||||||||
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| Status: | Not Peer Reviewed | |||||||||
| Publication Status: | Published | |||||||||
| Media of Output: | .xlsx | |||||||||
| Access rights to Published version: | Open Access | |||||||||
| Copyright Holders: | University of Warwick | |||||||||
| Description: | -->Software required |
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