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Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells

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Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wang, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2020) Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. [Dataset]

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Abstract

We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.

Item Type: Dataset
Subjects: Q Science > QD Chemistry
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Type of Data: Experimental data
Library of Congress Subject Headings (LCSH): Electrolytic oxidation, Silica, Silicon, Solar cells, Silicon solar cells, Silicon solar cells -- Effect of high temperatures on, Surface chemistry
Publisher: University of Warwick, School of Engineering
Official Date: 25 February 2020
Dates:
DateEvent
25 February 2020Published
26 August 2019Accepted
Status: Not Peer Reviewed
Publication Status: Published
Media of Output (format): .xlsx .txt
Access rights to Published version: Open Access (Creative Commons)
Copyright Holders: University of Warwick
Description:

-->Software required
Microsoft Excel
--> Organisation
One sheet per figure containing the data used in the related paper
-->Nature of the data
Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper.

Date of first compliant deposit: 25 February 2020
Date of first compliant Open Access: 25 February 2020
RIOXX Funder/Project Grant:
Project/Grant IDRIOXX Funder NameFunder ID
EP/M024911/1[EPSRC] Engineering and Physical Sciences Research Councilhttp://dx.doi.org/10.13039/501100000266
UNSPECIFIEDAustralian Renewable Energy Agencyhttp://dx.doi.org/10.13039/501100005105
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