Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wang, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2020) Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. [Dataset]

	Microsoft Excel (Excel file containing the data underpinning the figures in related article) Data set.xlsx - Published Version Available under License Creative Commons Attribution 4.0. Download (40Kb)
	Plain Text (Readme file) Read me.txt - Published Version Available under License Creative Commons Attribution 4.0. Download (704b)

Request Changes to record.

Abstract

We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.

Item Type:	Dataset
Divisions:	Faculty of Science > Engineering
Type of Data:	Experimental data
Publisher:	School of Engineering
Official Date:	25 February 2020
Dates:	Date Event 26 August 2019 Accepted 25 February 2020 Published
Date of first compliant deposit:	25 February 2020
Status:	Not Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Open Access
Copyright Holders:	University of Warwick
Description:	-->Software required Microsoft Excel --> Organisation One sheet per figure containing the data used in the related paper -->Nature of the data Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper.
RIOXX Funder/Project Grant:	Project/Grant ID RIOXX Funder Name Funder ID EP/M024911/1 [EPSRC] Engineering and Physical Sciences Research Council http://dx.doi.org/10.13039/501100000266
Related URLs:	Related item in WRAP Other

Request changes or add full text files to a record

Repository staff actions (login required)

View Item

Downloads