Dataset for: "Anodic oxidations: Excellent process durability and surface passivation for high efficiency silicon solar cells" by Nicholas E. Grant, Teng C. Kho, Kean C. Fong, Evan Franklin, Keith R McIntosh, Mathew Stocks, Yimao Wan, Er-Chien Wang, Ngwe Zin, John D. Murphy and Andrew Blakers Accepted for publication in Solar Energy Materials and Solar Cells on 26th August 2019. DOI: 10.1016/j.solmat.2019.110155 The dataset (a single file in XLSX format) contains the data behind the figures in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to nicholas.e.grant@warwick.ac.uk.