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Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells

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Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wan, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2019) Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. Solar Energy Materials and Solar Cells, 203 . 110155. doi:10.1016/j.solmat.2019.110155

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Official URL: https://doi.org/10.1016/j.solmat.2019.110155

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Abstract

We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.

Item Type: Journal Article
Subjects: Q Science > QD Chemistry
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Electrolytic oxidation , Silica, Silicon, Solar cells , Silicon solar cells, Silicon solar cells -- Effect of high temperatures on , Surface chemistry
Journal or Publication Title: Solar Energy Materials and Solar Cells
Publisher: Elsevier Science BV
ISSN: 0927-0248
Official Date: December 2019
Dates:
DateEvent
December 2019Published
6 September 2019Available
26 August 2019Accepted
Volume: 203
Article Number: 110155
DOI: 10.1016/j.solmat.2019.110155
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Open Access
RIOXX Funder/Project Grant:
Project/Grant IDRIOXX Funder NameFunder ID
EP/M024911/1[EPSRC] Engineering and Physical Sciences Research Councilhttp://dx.doi.org/10.13039/501100000266
UNSPECIFIEDAustralian Renewable Energy Agencyhttp://dx.doi.org/10.13039/501100005105
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