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Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells
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Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wan, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2019) Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. Solar Energy Materials and Solar Cells, 203 . 110155. doi:10.1016/j.solmat.2019.110155
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WRAP-anodic-oxidation-excellent-passivation-efficiency-solar-cells-Grant-2019.pdf - Published Version - Requires a PDF viewer. Available under License Creative Commons Attribution 4.0. Download (1298Kb) | Preview |
Official URL: https://doi.org/10.1016/j.solmat.2019.110155
Abstract
We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.
| Item Type: | Journal Article | |||||||||
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| Subjects: | Q Science > QD Chemistry T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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| Divisions: | Faculty of Science > Engineering | |||||||||
| Library of Congress Subject Headings (LCSH): | Electrolytic oxidation , Silica, Silicon, Solar cells , Silicon solar cells, Silicon solar cells -- Effect of high temperatures on , Surface chemistry | |||||||||
| Journal or Publication Title: | Solar Energy Materials and Solar Cells | |||||||||
| Publisher: | Elsevier Science BV | |||||||||
| ISSN: | 0927-0248 | |||||||||
| Official Date: | December 2019 | |||||||||
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| Volume: | 203 | |||||||||
| Article Number: | 110155 | |||||||||
| DOI: | 10.1016/j.solmat.2019.110155 | |||||||||
| Status: | Peer Reviewed | |||||||||
| Publication Status: | Published | |||||||||
| Access rights to Published version: | Open Access | |||||||||
| RIOXX Funder/Project Grant: |
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