The Library
Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells
Tools
Tools
Tools
Grant, Nicholas E., Kho, T. C., Fong, K. C., Franklin, E., McIntosh, K. R., Stocks, M., Wan, Y., Wang, Er-Chien, Zin, N. S., Murphy, John D. and Blakers, A. (2019) Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells. Solar Energy Materials and Solar Cells, 203 . 110155. doi:10.1016/j.solmat.2019.110155
|
PDF
WRAP-anodic-oxidation-excellent-passivation-efficiency-solar-cells-Grant-2019.pdf - Published Version - Requires a PDF viewer. Available under License Creative Commons Attribution 4.0. Download (1298Kb) | Preview |
Official URL: https://doi.org/10.1016/j.solmat.2019.110155
Abstract
We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.
| Item Type: | Journal Article | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Divisions: | Faculty of Science > Engineering | ||||||||
| Journal or Publication Title: | Solar Energy Materials and Solar Cells | ||||||||
| Publisher: | Elsevier Science BV | ||||||||
| ISSN: | 0927-0248 | ||||||||
| Official Date: | December 2019 | ||||||||
| Dates: |
|
||||||||
| Date of first compliant deposit: | 10 September 2019 | ||||||||
| Volume: | 203 | ||||||||
| Article Number: | 110155 | ||||||||
| DOI: | 10.1016/j.solmat.2019.110155 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Open Access | ||||||||
| RIOXX Funder/Project Grant: |
|
||||||||
| Related URLs: |
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
Downloads
Downloads per month over past year
