before-annealing contains data from before the diamond was annealed
after-annealing contains data from after the 3h 1000C anneal

Below these levels the data is divided by pitch (2um, 3um, 5um) and by array as labelled in the
map in the SI. Below this level data for pulsed microwave and automated measurements is organised
by site address (as labelled in per-layer POI images). e.g. M09-11 can be found on array M, 9um deep

Some additional HBT data was gathered seperately and is labelled by site.

Most of the non-imaging data has been captured using Qudi:
https://github.com/Ulm-IQO/qudi
http://doi.org/10.1016/j.softx.2017.02.001
https://github.com/WarwickEPR/qudi
and the .dat files contain raw ASCII table data (gzip compressed) with a header describing the meaning
of each column.

Processing of the data used a variety of tools (which can be identified by file extensions) including: Matlab (.m,.mat), R (.R), shell script (.sh), Perl (.pl), Fiji/ImageJ and ImageMagick. Microscopy imaging was captured with a Leica transmission microscope (output converted from tiff to jpeg for space efficiency).

README files in sections may add additional information where the usage of scripts and interpretation of files needs further documentation.