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Modeling and control methodology for an XYZ micro manipulator

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Tian, Yanling, Ma, Yue, Lu, Kangkang, Yang, Mingxuan, Zhao, Xiaolu, Wang, Fujun and Zhang, Dawei (2019) Modeling and control methodology for an XYZ micro manipulator. Review of Scientific Instruments, 90 (10). 105007. doi:10.1063/1.5116094

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Official URL: https://doi.org/10.1063/1.5116094

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Item Type: Journal Article
Subjects: T Technology > T Technology (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science > Engineering
SWORD Depositor: Library Publications Router
Library of Congress Subject Headings (LCSH): Microtechnology, Nanomanufacturing, Microelectromechanical systems
Journal or Publication Title: Review of Scientific Instruments
Publisher: AIP Publishing
ISSN: 1089-7623
Official Date: 1 October 2019
Dates:
DateEvent
1 October 2019Published
23 October 2019Available
9 October 2019Accepted
Date of first compliant deposit: 22 January 2020
Volume: 90
Number: 10
Article Number: 105007
DOI: 10.1063/1.5116094
Status: Peer Reviewed
Publication Status: Published
Publisher Statement: “This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in : Rev. Sci. Instrum. 90, 105007 (2019); https://doi.org/10.1063/1.5116094 and may be found at https://doi.org/10.1063/1.5116094
Access rights to Published version: Restricted or Subscription Access
RIOXX Funder/Project Grant:
Project/Grant IDRIOXX Funder NameFunder ID
51675371[NSFC] National Natural Science Foundation of Chinahttp://dx.doi.org/10.13039/501100001809
51675367[NSFC] National Natural Science Foundation of Chinahttp://dx.doi.org/10.13039/501100001809
51675376 [NSFC] National Natural Science Foundation of Chinahttp://dx.doi.org/10.13039/501100001809
2016YFE0112100 National Basic Research Program of China (973 Program)http://dx.doi.org/10.13039/501100012166
2017YFB1104700National Basic Research Program of China (973 Program)http://dx.doi.org/10.13039/501100012166
2017YFE0112100National Basic Research Program of China (973 Program)http://dx.doi.org/10.13039/501100012166
734174H2020 European Research Councilhttp://dx.doi.org/10.13039/100010663

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