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Modeling and control methodology for an XYZ micro manipulator
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Tian, Yanling, Ma, Yue, Lu, Kangkang, Yang, Mingxuan, Zhao, Xiaolu, Wang, Fujun and Zhang, Dawei (2019) Modeling and control methodology for an XYZ micro manipulator. Review of Scientific Instruments, 90 (10). 105007. doi:10.1063/1.5116094
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Official URL: https://doi.org/10.1063/1.5116094
| Item Type: | Journal Article | ||||||||||||||||||||||||
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| Subjects: | T Technology > T Technology (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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| Divisions: | Faculty of Science > Engineering | ||||||||||||||||||||||||
| SWORD Depositor: | Library Publications Router | ||||||||||||||||||||||||
| Library of Congress Subject Headings (LCSH): | Microtechnology, Nanomanufacturing, Microelectromechanical systems | ||||||||||||||||||||||||
| Journal or Publication Title: | Review of Scientific Instruments | ||||||||||||||||||||||||
| Publisher: | AIP Publishing | ||||||||||||||||||||||||
| ISSN: | 1089-7623 | ||||||||||||||||||||||||
| Official Date: | 1 October 2019 | ||||||||||||||||||||||||
| Dates: |
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| Volume: | 90 | ||||||||||||||||||||||||
| Number: | 10 | ||||||||||||||||||||||||
| Article Number: | 105007 | ||||||||||||||||||||||||
| DOI: | 10.1063/1.5116094 | ||||||||||||||||||||||||
| Status: | Peer Reviewed | ||||||||||||||||||||||||
| Publication Status: | Published | ||||||||||||||||||||||||
| Publisher Statement: | “This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in : Rev. Sci. Instrum. 90, 105007 (2019); https://doi.org/10.1063/1.5116094 and may be found at https://doi.org/10.1063/1.5116094 | ||||||||||||||||||||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||||||||||||||||||||
| RIOXX Funder/Project Grant: |
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