Dataset for: "Sub-2 cm/s passivation of silicon surfaces by aprotic solutions" by Alex I. Pointon, Nicholas E. Grant, Sophie L. Pain, Joshua T. White, John D. Murphy Accepted for publication in Applied Physics Letters on 10th March 2020. DOI: 10.1063/5.0003704 The dataset (a single file in XLSX format) contains the data behind the figures in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.