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Repeatability analysis of two methods for height measurements in the micrometer range
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Ferri, Carlo, Brousseau, Emmanuel, Dimov, Stefan and Mattsson, Lars (2006) Repeatability analysis of two methods for height measurements in the micrometer range. In: 4M 2006 - Second International Conference on Multi-Material Micro Manufacture, Grenoble, France, 20-22 Sep 2006 pp. 165-168. ISBN 9780080452630.
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Official URL: https://doi.org/10.1016/B978-008045263-0/50038-6
Abstract
A precision study of two height measuring methods is carried out. The first method is based on a White Light Interferometer (WLI) and the second on a Co-ordinate Measuring Machine (CMM) equipped with an optical probe. The height measurements considered are in the range [150; 250] μm. Point and interval estimates of repeatability are reported in the paper. This study presents experimental evidence that, under repeatability conditions, the precision of the WLI method is about five times higher than that of the optical CMM method. Furthermore, the precision of WLI is constant over the investigated height range whereas a dependency of the CMM precision on the nominal dimensions is identified. For both methods a linear relationship is detected between the random error and the sequence in which the measurements are taken.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||
Publisher: | Elsevier | ||||
ISBN: | 9780080452630 | ||||
Official Date: | 2006 | ||||
Dates: |
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Page Range: | pp. 165-168 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 4M 2006 - Second International Conference on Multi-Material Micro Manufacture | ||||
Type of Event: | Conference | ||||
Location of Event: | Grenoble, France | ||||
Date(s) of Event: | 20-22 Sep 2006 |
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