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Performance Improvement of >10kV SiC IGBTs with retrograde p-well
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Tiwari, Amit K., Antoniou, Marina, Lophitis, Neo, Perkins, Samuel, Trajkovic, Tatjana and Udrea, Florin (2019) Performance Improvement of >10kV SiC IGBTs with retrograde p-well. In: 12th European Conference on Silicon Carbide and Related Materials , Birmingham, United Kingdom, 02-06 Sep 2018. Published in: Materials Science Forum, 963 pp. 639-642. ISBN 9783035713329. ISSN 0255-5476. doi:10.4028/www.scientific.net/MSF.963.639
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.9...
Abstract
A p-well consisting of a retrograde doping profile is investigated for performance improvement of >10kV SiC IGBTs. The retrograde p-well, which can be realized using low-energy shallow implants, effectively addresses the punch-through, a common issue in high-voltage vertical architectures consisting of a conventional p-well with typical doping density of 1e17cm-3 and depth 1μm. The innovative approach offers an extended control over the threshold voltage. Without any punch-through, a threshold voltage in the range 6V-7V is achieved with gate-oxide thickness of 100nm. Gate oxide thickness is typically restricted to 50nm if a conventional p-well with doping density of 1e17cm-3 is utilized. We therefore propose a highly promising solution, the retrograde p-well, for the development of >10kV SiC IGBTs.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Materials Science Forum | ||||
| Publisher: | Trans Tech Publications Ltd | ||||
| ISBN: | 9783035713329 | ||||
| ISSN: | 0255-5476 | ||||
| Official Date: | July 2019 | ||||
| Dates: |
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| Volume: | 963 | ||||
| Page Range: | pp. 639-642 | ||||
| DOI: | 10.4028/www.scientific.net/MSF.963.639 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 12th European Conference on Silicon Carbide and Related Materials | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Birmingham, United Kingdom | ||||
| Date(s) of Event: | 02-06 Sep 2018 |
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