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Transient performance of >10kV SiC IGBT with an optimized retrograde p-well
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Tiwari, Amit K., Antoniou, Marina, Trajkovic, Tatjana, Dai, Tian, Gammon, Peter M. and Udrea, Florin (2020) Transient performance of >10kV SiC IGBT with an optimized retrograde p-well. In: UNSPECIFIED. Published in: Materials Science Forum, 1004 pp. 917-922. doi:10.4028/www.scientific.net/MSF.1004.917 ISSN 1662-9752.
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.1...
Abstract
The impact of different p-well designs upon the transient performance, in particular, the turn-off losses and short-circuit capability, of a >10 kV SiC n-IGBT is assessed. We find that in addition to improved transient performance, a substantial reduction in the depth of p-well implants can be achieved, if an extensively optimized retrograde approach is utilized. A conventional p-well consisting of a uniformly doped deep implant (doping concentration of ~3×1017 cm-3 and depth of >1.5 µm) exhibits considerable turn-off switching losses without offering any short circuit capability. However, an optimized retrograde p-well consisting of a variable doping profile and depth as shallow as 0.7-0.8 µm results in much reduced turn-off losses with excellent short-circuit capability. Shallow implants are desirable to lower the development cost and processing challenges. The retrograde p-well is therefore highly promising for the development of >10 kV class of SiC IGBTs.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Materials Science Forum | ||||
| Publisher: | Trans Tech Publications, Ltd. | ||||
| ISSN: | 1662-9752 | ||||
| Official Date: | July 2020 | ||||
| Dates: |
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| Volume: | 1004 | ||||
| Page Range: | pp. 917-922 | ||||
| DOI: | 10.4028/www.scientific.net/MSF.1004.917 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Type of Event: | Conference |
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