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Analysis of grazing incidence X-ray diffuse scatter from Co-Cu multilayers

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UNSPECIFIED (1998) Analysis of grazing incidence X-ray diffuse scatter from Co-Cu multilayers. PHYSICA B-CONDENSED MATTER, 253 (3-4). pp. 278-289. ISSN 0921-4526

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Abstract

Grazing incidence diffuse X-ray scattering data from a Co-Cu multilayer with stepped interfaces grown by molecular beam epitaxy on a copper silicide buffer on a silicon substrate has been analysed using a computer code based on a fractal interface within the distorted wave Born approximation. We have extended the theory to include the scattering from a stepped interface and have shown that a single set of structural parameters can be used to obtain an excellent agreement between simulation and experimental data taken under very different X-ray optical conditions. The symmetry of the diffuse scatter on rotation about the surface normal can be explained if it arises from step bunching at the ends of extensive flat terraces. These steps have a self-affine nature, enabling the fractal model to be used successfully. (C) 1998 Elsevier Science B.V. All rights reserved.

Item Type: Journal Article
Subjects: Q Science > QC Physics
Journal or Publication Title: PHYSICA B-CONDENSED MATTER
Publisher: ELSEVIER SCIENCE BV
ISSN: 0921-4526
Date: October 1998
Volume: 253
Number: 3-4
Number of Pages: 12
Page Range: pp. 278-289
Publication Status: Published
URI: http://wrap.warwick.ac.uk/id/eprint/15382

Data sourced from Thomson Reuters' Web of Knowledge

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