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Comparative study of spin-coated and vapour deposited nickel oxides for detecting VOCs
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Ayyala, Sai Kiran, Tsang, Jone Him, Blackman, Chris and Covington, James A. (2020) Comparative study of spin-coated and vapour deposited nickel oxides for detecting VOCs. In: 2020 IEEE Sensors, Virtual conference, 25-28 Oct 2020 ISBN 9781728168012. doi:10.1109/SENSORS47125.2020.9278881 ISSN 2168-9229.
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Official URL: http://dx.doi.org/10.1109/SENSORS47125.2020.927888...
Abstract
Nickel oxide (p-type) sensors are developed to detect volatile organic compounds (VOCs). In the presented work, NiO sensors are fabricated and tested towards acetone, ethanol, toluene, hexane, methanol, and n-propanol vapours between 5 to 25 parts-per-million concentrations, under both dry and humid conditions. NiO films are deposited onto alumina substrates using both spin-coating (SC) and vapour deposition (AACVD) methods. The measured thickness of the spin coated and AACVD NiO films are approximately comparable at 10.3 μm and 6.7 μm, respectively. Both SC and AACVD sensors showed a maximum response at 350°C. No significant influence of humidity was observed on sensor response and baseline resistance for either SC or AACVD sensors. The sensitivity is found to be highest for ethanol, acetone, and methanol vapours than the rest.
| Item Type: | Conference Item (Paper) | ||||||
|---|---|---|---|---|---|---|---|
| Subjects: | Q Science > QD Chemistry | ||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
| Publisher: | IEEE | ||||||
| ISBN: | 9781728168012 | ||||||
| ISSN: | 2168-9229 | ||||||
| Official Date: | 9 December 2020 | ||||||
| Dates: |
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| DOI: | 10.1109/SENSORS47125.2020.9278881 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||
| Conference Paper Type: | Paper | ||||||
| Title of Event: | 2020 IEEE Sensors | ||||||
| Type of Event: | Conference | ||||||
| Location of Event: | Virtual conference | ||||||
| Date(s) of Event: | 25-28 Oct 2020 | ||||||
| Related URLs: |
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