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Micromachined ultrasonic capacitance transducers for immersion applications

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UNSPECIFIED (1998) Micromachined ultrasonic capacitance transducers for immersion applications. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 45 (2). pp. 367-375. ISSN 0885-3010

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Abstract

Investigations into the characteristics of water-coupled ultrasonic capacitance transducers have been undertaken for a range of transducer configurations. The radiated fields have been scanned in water using a miniature hydrophone detector, and the results compared to theory based on a plane piston approach. Micromachined back-plates in conjunction with thin Mylar and mica membranes have been investigated, together with aperture modifications such as an annulus and Fresnel zone plate. The measured results agree well with theory, thus demonstrating that wideband predictable performance (> 8 MHz) is obtainable with such transducers. Additionally, pulse-echo C-scans of a Plexiglas plate containing an artificial defect have been undertaken with the capacitance transducer, in order to demonstrate that the capacitance transducer has sufficient sensitivity to allow routine nondestructive testing within immersion applications.

Item Type: Journal Article
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Journal or Publication Title: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN: 0885-3010
Date: March 1998
Volume: 45
Number: 2
Number of Pages: 9
Page Range: pp. 367-375
Publication Status: Published
URI: http://wrap.warwick.ac.uk/id/eprint/15924

Data sourced from Thomson Reuters' Web of Knowledge

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