Thermal modelling and characterisation of micropower chemoresistive silicon sensors
UNSPECIFIED. (1997) Thermal modelling and characterisation of micropower chemoresistive silicon sensors. SENSORS AND ACTUATORS B-CHEMICAL, 45 (1). pp. 19-26. ISSN 0925-4005Full text not available from this repository.
There is considerable interest in the development of low-cost, low-power resistive sensors for possible application in hand-held gas monitors. In this paper we describe the fabrication of a high-temperature, resistive sensor using silicon microtechnology which lies on a sub-micron thick membrane with an embedded platinum resistance heater. A thermal model of this micro-hotplate is constructed and compared with its observed behaviour. The microsensor can be operated at temperatures of up to 600 degrees C and has a low d.c. power consumption per sensor of 40 mW at 300 degrees C. As the thermal time-constant of the microsensor is only about 5 ms, its average power consumption can be reduced by a factor of at least ten through an a.c. mode of operation, thus making a single device or even an array device suitable for battery-powered instruments. (C) 1997 Elsevier Science S.A.
|Item Type:||Journal Article|
|Subjects:||Q Science > QD Chemistry|
|Journal or Publication Title:||SENSORS AND ACTUATORS B-CHEMICAL|
|Publisher:||ELSEVIER SCIENCE SA|
|Number of Pages:||8|
|Page Range:||pp. 19-26|
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