UNSPECIFIED (1997) Surface metrology. [Journal Item]

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Abstract

Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards miniaturization is being taken beyond the nanometrology scale, some theoretical restrictions are likely to be encountered.

Item Type:	Journal Item
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Journal or Publication Title:	MEASUREMENT SCIENCE & TECHNOLOGY
Publisher:	IOP PUBLISHING LTD
ISSN:	0957-0233
Date:	September 1997
Volume:	8
Number:	9
Number of Pages:	18
Page Range:	pp. 955-972
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/16410

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