UNSPECIFIED (1997) Surface metrology. MEASUREMENT SCIENCE & TECHNOLOGY, 8 (9). pp. 955-972. ISSN 0957-0233Full text not available from this repository.
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards miniaturization is being taken beyond the nanometrology scale, some theoretical restrictions are likely to be encountered.
|Item Type:||Journal Item|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)|
|Journal or Publication Title:||MEASUREMENT SCIENCE & TECHNOLOGY|
|Publisher:||IOP PUBLISHING LTD|
|Number of Pages:||18|
|Page Range:||pp. 955-972|
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