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An introduction to terahertz time-domain spectroscopic ellipsometry
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Chen, Xuequan and Pickwell-MacPherson, Emma (2022) An introduction to terahertz time-domain spectroscopic ellipsometry. APL Photonics, 7 . 071101. doi:10.1063/5.0094056 ISSN 2378-0967.
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Official URL: https://doi.org/10.1063/5.0094056
Abstract
Terahertz spectroscopy has mainly been performed based on terahertz time-domain spectroscopy systems in a transmission or a window/prism-supported reflection configuration. These conventional approaches have limitations in characterizing opaque solids, conductive thin-films, multiple-layer structures and anisotropic materials. Ellipsometry is a self-reference characterization technique with a wide adaptibility that can be applied for nearly all sample types. However, terahertz ellipsometry has not yet been widely applied, mainly due to the critical requirement on the optical setting, the large discrepancy to traditional terahertz spectroscopy and conventional optical ellipsometry. In this paper we introduce terahertz time-domain spectroscopic ellipsometry from the basic concept, theory, optical configuration, error calibration to characterization methods. Experimental results on silicon wafers of different resistivities are presented as examples. This paper is serving as a tutorial to provide key technical guidance and skills for accurate terahertz time-domain spectroscopic ellipsometry.
| Item Type: | Journal Article | ||||||||||||||||||
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| Subjects: | Q Science > QC Physics | ||||||||||||||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||||||||||||||
| SWORD Depositor: | Library Publications Router | ||||||||||||||||||
| Library of Congress Subject Headings (LCSH): | Ellipsometry, Spectrum analysis, Terahertz spectroscopy, Time-domain analysis, Polarization (Light) | ||||||||||||||||||
| Journal or Publication Title: | APL Photonics | ||||||||||||||||||
| Publisher: | AIP Publishing | ||||||||||||||||||
| ISSN: | 2378-0967 | ||||||||||||||||||
| Official Date: | 1 July 2022 | ||||||||||||||||||
| Dates: |
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| Volume: | 7 | ||||||||||||||||||
| Article Number: | 071101 | ||||||||||||||||||
| DOI: | 10.1063/5.0094056 | ||||||||||||||||||
| Status: | Peer Reviewed | ||||||||||||||||||
| Publication Status: | Published | ||||||||||||||||||
| Access rights to Published version: | Open Access (Creative Commons) | ||||||||||||||||||
| Date of first compliant deposit: | 24 November 2022 | ||||||||||||||||||
| Date of first compliant Open Access: | 24 November 2022 | ||||||||||||||||||
| RIOXX Funder/Project Grant: |
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