Dataset for: "Electronic Characteristics of Ultra-Thin Passivation Layers for Silicon Photovoltaics" by Sophie L. Pain, Edris Khorani, Tim Niewelt, Ailish Wratten, Galo J. Paez Fajardo, Ben P. Winfield, Ruy S. Bonilla, Marc Walker, Louis F. J. Piper, Nicholas E. Grant, John D. Murphy Accepted for publication in Advanced Materials Interfaces on 27th July 2022. DOI: 10.1002/admi.202201339 The dataset (a single file in XLSX format) contains the data behind the figures in the paper and supporting information. Captions to the figures are given in the paper and supporting information. Abbreviations, variables and methods used are defined in the paper. Please address any queries to sophie.pain@warwick.ac.uk or john.d.murphy@warwick.ac.uk.