Dataset for: "Mechanisms of Silicon Surface Passivation by Negatively Charged Hafnium Oxide Thin Films" by A. Wratten, S.L. Pain, D. Walker, A.B. Renz, E. Khorani, T. Niewelt, N.E. Grant, J.D. Murphy Accepted for publication in IEEE Journal of Photovoltaics on 1st December 2022. DOI: to be assigned The dataset (a single file in XLSX format) contains the data behind the figures in the paper and supporting information. Captions to the figures are given in the paper and supporting information. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.