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Combined resistive and calorimetric sensing of gases using a single silicon micromachined device
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UNSPECIFIED (1997) Combined resistive and calorimetric sensing of gases using a single silicon micromachined device. In: 1997 International Conference on Solid-State Sensors and Actuators, JUN 16-19, 1997, CHICAGO, IL.
Full text not available from this repository.Abstract
In this paper we report on the fabrication, testing and implementation of a planar silicon micromachined device that can be simultaneously operated as a low power microcalorimeter and a resistive gas sensor. A ''dual-mode'' sensor has therefore been designed to maximise application flexibility and minimise production costs.
| Item Type: | Conference Item (UNSPECIFIED) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Journal or Publication Title: | TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 |
| Publisher: | I E E E |
| ISBN: | 0-7803-3829-4 |
| Date: | 1997 |
| Number of Pages: | 4 |
| Page Range: | pp. 935-938 |
| Publication Status: | Published |
| Title of Event: | 1997 International Conference on Solid-State Sensors and Actuators |
| Location of Event: | CHICAGO, IL |
| Date(s) of Event: | JUN 16-19, 1997 |
| URI: | http://wrap.warwick.ac.uk/id/eprint/17600 |
Data sourced from Thomson Reuters' Web of Knowledge
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