Combined resistive and calorimetric sensing of gases using a single silicon micromachined device
UNSPECIFIED (1997) Combined resistive and calorimetric sensing of gases using a single silicon micromachined device. In: 1997 International Conference on Solid-State Sensors and Actuators, JUN 16-19, 1997, CHICAGO, IL.Full text not available from this repository.
In this paper we report on the fabrication, testing and implementation of a planar silicon micromachined device that can be simultaneously operated as a low power microcalorimeter and a resistive gas sensor. A ''dual-mode'' sensor has therefore been designed to maximise application flexibility and minimise production costs.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||T Technology > TK Electrical engineering. Electronics Nuclear engineering|
|Journal or Publication Title:||TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2|
|Publisher:||I E E E|
|Number of Pages:||4|
|Page Range:||pp. 935-938|
|Title of Event:||1997 International Conference on Solid-State Sensors and Actuators|
|Location of Event:||CHICAGO, IL|
|Date(s) of Event:||JUN 16-19, 1997|
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