UNSPECIFIED (1997) Field characterization of an air-coupled micromachined ultrasonic capacitance transducer. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 101 (1). pp. 315-322. ISSN 0001-4966

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Abstract

Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The field of a 2-MHz bandwidth silicon backplate capacitance transducer has been scanned in air using a l-mm-diam miniature detector at frequencies of up to 1.5 MHz. The radiated peak sound-pressure field is compared to theory based on a plane piston approach for various driving signals, namely pulsed and tone burst excitation. Aperture modifications, such as an annulus and a zone plate, have also been investigated and the devices have been shown to behave as predicted by theory. (C) 1997 Acoustical Society of America.

Item Type:	Journal Article
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Journal or Publication Title:	JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
Publisher:	AMER INST PHYSICS
ISSN:	0001-4966
Date:	January 1997
Volume:	101
Number:	1
Number of Pages:	8
Page Range:	pp. 315-322
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/18085

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