Field characterization of an air-coupled micromachined ultrasonic capacitance transducer
UNSPECIFIED. (1997) Field characterization of an air-coupled micromachined ultrasonic capacitance transducer. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 101 (1). pp. 315-322. ISSN 0001-4966Full text not available from this repository.
Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The field of a 2-MHz bandwidth silicon backplate capacitance transducer has been scanned in air using a l-mm-diam miniature detector at frequencies of up to 1.5 MHz. The radiated peak sound-pressure field is compared to theory based on a plane piston approach for various driving signals, namely pulsed and tone burst excitation. Aperture modifications, such as an annulus and a zone plate, have also been investigated and the devices have been shown to behave as predicted by theory. (C) 1997 Acoustical Society of America.
|Item Type:||Journal Article|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)|
|Journal or Publication Title:||JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA|
|Publisher:||AMER INST PHYSICS|
|Official Date:||January 1997|
|Number of Pages:||8|
|Page Range:||pp. 315-322|
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