UNSPECIFIED (1996) A controlled-force stylus displacement probe. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 19 (2-3). pp. 105-111. ISSN 0141-6359

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Abstract

A novel design of displacement profiler with a controllable stylus force is presented. It provides highly controlled conditions for contact measurement of, for example, small step heights or surface roughness. Incorporating an electromagnetic force actuator and force feedback control, the profiler provides electronically selectable contact force in the range of 0.01-10 mN and gives a constant static and dynamic loading. In a typical configuration, it has a range of a few micrometers with a discrimination to better than 1 nm at a bandwidth higher than that of a conventional stylus instrument. (C) Elsevier Science Inc., 1996

Item Type:	Journal Article
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TS Manufactures T Technology
Journal or Publication Title:	PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING
Publisher:	BUTTERWORTH-HEINEMANN
ISSN:	0141-6359
Date:	October 1996
Volume:	19
Number:	2-3
Number of Pages:	7
Page Range:	pp. 105-111
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/18173

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