The Library
Fabrication of microstructures by ion beam micromachining
Tools
Tools
Tools
UNSPECIFIED (1996) Fabrication of microstructures by ion beam micromachining. In: 2nd Annual SPIE Conference on Microlithography and Metrology in Micromachining, OCT 14-15, 1996, AUSTIN, TX.
Full text not available from this repository.| Item Type: | Conference Item (UNSPECIFIED) |
|---|---|
| Subjects: | Q Science > QC Physics |
| Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) |
| Journal or Publication Title: | MICROLITHOGRAPHY AND METROLOGY IN MICROMACHINING II |
| Publisher: | SPIE - INT SOC OPTICAL ENGINEERING |
| ISBN: | 0-8194-2278-9 |
| Editor: | Postek, MT and Friedrich, C |
| Date: | 1996 |
| Volume: | 2880 |
| Number of Pages: | 8 |
| Page Range: | pp. 248-255 |
| Publication Status: | Published |
| Title of Event: | 2nd Annual SPIE Conference on Microlithography and Metrology in Micromachining |
| Location of Event: | AUSTIN, TX |
| Date(s) of Event: | OCT 14-15, 1996 |
| URI: | http://wrap.warwick.ac.uk/id/eprint/18650 |
Data sourced from Thomson Reuters' Web of Knowledge
Actions (login required)
 |
View Item |
