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Metrological x-ray interferometry in the micrometre region
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UNSPECIFIED (1996) Metrological x-ray interferometry in the micrometre region. NANOTECHNOLOGY, 7 (1). pp. 1-12. ISSN 0957-4484.
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Abstract
A 'free-standing' microdisplacement calibrator is described which utilizes a previously proposed but untested design of monolithic x-ray interferometer. The monolith is driven by a twist-compensating electromagnetic actuator and a specially designed 1 ppm current source and is held, along with its x-ray source and detectors, within a desk-top-mounted radiation enclosure. It is confirmed that highly traceable displacements resolved to a small fraction of a nanometre can be obtained over a continuous range of at least 10 mu m under conditions typical of a routine metrology room. An overview of the system and its performance is given, but this paper concentrates particularly on the monolith design and on vibration suppression
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology Q Science > QC Physics |
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| Journal or Publication Title: | NANOTECHNOLOGY | ||||
| Publisher: | IOP PUBLISHING LTD | ||||
| ISSN: | 0957-4484 | ||||
| Official Date: | March 1996 | ||||
| Dates: |
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| Volume: | 7 | ||||
| Number: | 1 | ||||
| Number of Pages: | 12 | ||||
| Page Range: | pp. 1-12 | ||||
| Publication Status: | Published |
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