UNSPECIFIED (1996) Metrological x-ray interferometry in the micrometre region. NANOTECHNOLOGY, 7 (1). pp. 1-12. ISSN 0957-4484

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Abstract

A 'free-standing' microdisplacement calibrator is described which utilizes a previously proposed but untested design of monolithic x-ray interferometer. The monolith is driven by a twist-compensating electromagnetic actuator and a specially designed 1 ppm current source and is held, along with its x-ray source and detectors, within a desk-top-mounted radiation enclosure. It is confirmed that highly traceable displacements resolved to a small fraction of a nanometre can be obtained over a continuous range of at least 10 mu m under conditions typical of a routine metrology room. An overview of the system and its performance is given, but this paper concentrates particularly on the monolith design and on vibration suppression

Item Type:	Journal Article
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology Q Science > QC Physics
Journal or Publication Title:	NANOTECHNOLOGY
Publisher:	IOP PUBLISHING LTD
ISSN:	0957-4484
Date:	March 1996
Volume:	7
Number:	1
Number of Pages:	12
Page Range:	pp. 1-12
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/18744

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