A laterally driven micromachined resonant pressure sensor
UNSPECIFIED (1996) A laterally driven micromachined resonant pressure sensor. In: 8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX), STOCKHOLM, SWEDEN, JUN 25-29, 1995. Published in: SENSORS AND ACTUATORS A-PHYSICAL, 52 (1-3). pp. 86-91.Full text not available from this repository.
A new type of resonant pressure sensor is presented which employs a laterally driven resonant strain gauge. The resonant strain gauge is designed using simple linear elastic theory and the sensor fabricated by a combination of bulk- and surface-micromachining techniques. The strain gauge is driven electrostatically and the resultant vibration sensed capacitively. Its lateral mode of oscillation offers several advantages, such as a Q-factor insensitive to the leakage of cavity gases. The resonator has been designed to have a fundamental frequency of 52 kHz and a gauge factor of 60 Hz mu N-1. Preliminary measurements of devices yield a fundamental frequency of 52+/-15 kHz, a Q-factor in air of 50 and a pressure sensitivity of 8.8 kHz bar(-1).
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||T Technology > TK Electrical engineering. Electronics Nuclear engineering|
|Journal or Publication Title:||SENSORS AND ACTUATORS A-PHYSICAL|
|Publisher:||ELSEVIER SCIENCE SA LAUSANNE|
|Number of Pages:||6|
|Page Range:||pp. 86-91|
|Title of Event:||8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX)|
|Location of Event:||STOCKHOLM, SWEDEN|
|Date(s) of Event:||JUN 25-29, 1995|
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