UNSPECIFIED (1996) A laterally driven micromachined resonant pressure sensor. In: 8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX), JUN 25-29, 1995, STOCKHOLM, SWEDEN.

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Abstract

A new type of resonant pressure sensor is presented which employs a laterally driven resonant strain gauge. The resonant strain gauge is designed using simple linear elastic theory and the sensor fabricated by a combination of bulk- and surface-micromachining techniques. The strain gauge is driven electrostatically and the resultant vibration sensed capacitively. Its lateral mode of oscillation offers several advantages, such as a Q-factor insensitive to the leakage of cavity gases. The resonator has been designed to have a fundamental frequency of 52 kHz and a gauge factor of 60 Hz mu N-1. Preliminary measurements of devices yield a fundamental frequency of 52+/-15 kHz, a Q-factor in air of 50 and a pressure sensitivity of 8.8 kHz bar(-1).

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Journal or Publication Title:	SENSORS AND ACTUATORS A-PHYSICAL
Publisher:	ELSEVIER SCIENCE SA LAUSANNE
ISSN:	0924-4247
Date:	March 1996
Volume:	52
Number:	1-3
Number of Pages:	6
Page Range:	pp. 86-91
Publication Status:	Published
Title of Event:	8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX)
Location of Event:	STOCKHOLM, SWEDEN
Date(s) of Event:	JUN 25-29, 1995
URI:	http://wrap.warwick.ac.uk/id/eprint/18760

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