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Design of a silicon microsensor array device for gas analysis
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UNSPECIFIED (1996) Design of a silicon microsensor array device for gas analysis. MICROELECTRONICS JOURNAL, 27 (6). pp. 449-457. ISSN 0026-2692.
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Abstract
This paper describes the design of a silicon-based microsensor array for application in gas or odour monitoring. Individual sensor cells consist of both lateral and vertical electrode pairs to measure film conductance and/or capacitance. The fabrication process involves standard silicon technologies to integrate a platinum or nickel-iron heater below the sensor cells. A simulation of the device gives a thermal response time of only 60 ms and an ultra low power loss of about 50 mW at 400 degrees C per sensor. This compares well with experimental values observed on a similar device. The process technology is suitable for both the deposition of organic materials (e.g. conducting polymers) and inorganic materials (e.g. semiconducting oxides). A scheme of the transducer interface circuitry is also provided, and could be used in a portable battery-powered instrument. (C) 1996 Elsevier Science Ltd.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology |
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| Journal or Publication Title: | MICROELECTRONICS JOURNAL | ||||
| Publisher: | ELSEVIER ADVANCED TECHNOLOGY | ||||
| ISSN: | 0026-2692 | ||||
| Official Date: | September 1996 | ||||
| Dates: |
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| Volume: | 27 | ||||
| Number: | 6 | ||||
| Number of Pages: | 9 | ||||
| Page Range: | pp. 449-457 | ||||
| Publication Status: | Published |
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