UNSPECIFIED. (1996) Design of a silicon microsensor array device for gas analysis. MICROELECTRONICS JOURNAL, 27 (6). pp. 449-457. ISSN 0026-2692

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Abstract

This paper describes the design of a silicon-based microsensor array for application in gas or odour monitoring. Individual sensor cells consist of both lateral and vertical electrode pairs to measure film conductance and/or capacitance. The fabrication process involves standard silicon technologies to integrate a platinum or nickel-iron heater below the sensor cells. A simulation of the device gives a thermal response time of only 60 ms and an ultra low power loss of about 50 mW at 400 degrees C per sensor. This compares well with experimental values observed on a similar device. The process technology is suitable for both the deposition of organic materials (e.g. conducting polymers) and inorganic materials (e.g. semiconducting oxides). A scheme of the transducer interface circuitry is also provided, and could be used in a portable battery-powered instrument. (C) 1996 Elsevier Science Ltd.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology
Journal or Publication Title:	MICROELECTRONICS JOURNAL
Publisher:	ELSEVIER ADVANCED TECHNOLOGY
ISSN:	0026-2692
Official Date:	September 1996
Dates:	Date Event September 1996 UNSPECIFIED
Volume:	27
Number:	6
Number of Pages:	9
Page Range:	pp. 449-457
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/18767

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