UNSPECIFIED (1994) A SIMPLE 2-AXIS ULTRAPRECISION ACTUATOR. REVIEW OF SCIENTIFIC INSTRUMENTS, 65 (4 Part 1). pp. 910-917. ISSN 0034-6748

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Abstract

This paper describes a highly controllable, short-range translation and rotation mechanism. Two solenoid-magnet force actuators are applied to a simple elastic mechanism resulting in separable translation and rotation drive axes. To provide design rules and assess potential error sources, a theoretical model is discussed and experimentally evaluated. Two such actuators using monolithic aluminum and single crystal silicon flexures have been constructed and measured using stylus-based, optical and x-ray interferometric techniques. They are used to demonstrate both longer range motions of 80 mum and 3.6 mrad and higher precision motions, with resolution of better than 0.6 nrad over ranges of around 10 murad across 1 mum displacement. Performance of these devices was limited primarily by the available drive electronics and measurement techniques, so it is expected that even better precision can be achieved.

Item Type:	Journal Article
Subjects:	Q Science > QC Physics
Journal or Publication Title:	REVIEW OF SCIENTIFIC INSTRUMENTS
Publisher:	AMER INST PHYSICS
ISSN:	0034-6748
Date:	April 1994
Volume:	65
Number:	4 Part 1
Number of Pages:	8
Page Range:	pp. 910-917
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/20726

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