UNSPECIFIED (1994) A SCANNING ELECTRON-MICROSCOPE BASED MICROINDENTATION SYSTEM. REVIEW OF SCIENTIFIC INSTRUMENTS, 65 (3). pp. 632-638. ISSN 0034-6748

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Abstract

The design and characterization of a scanning electron microscope based microindentor is presented. Dynamic, high magnification imaging of the indentor-specimen contact zone is possible, permitting observation of indent events. Applied load as a function of indentor tip displacement is continuously monitored during indentation. The maximum applied load capability of 20 N is measured to a resolution of 1 mN with a piezoelectric transducer mounted on the indentor shaft. Displacement is measured with a specially developed capacitance gauge that is again mounted on the indentor shaft near the indentor tip and records tip displacement with respect to the specimen surface to a resolution of 10 nm over a 100 mum range. The instrument is vacuum compatible, capable of remote operation, has a short measurement loop, and a potentially high bandwidth response. Results from a fiber push-down test on a SiC fiber reinforced glass ceramic are reported to illustrate the capability of the instrument in performing measurements across the nanoindentation and microindentation ranges.

Item Type:	Journal Article
Subjects:	Q Science > QC Physics
Journal or Publication Title:	REVIEW OF SCIENTIFIC INSTRUMENTS
Publisher:	AMER INST PHYSICS
ISSN:	0034-6748
Date:	March 1994
Volume:	65
Number:	3
Number of Pages:	7
Page Range:	pp. 632-638
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/20751

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