A SCANNING ELECTRON-MICROSCOPE BASED MICROINDENTATION SYSTEM
UNSPECIFIED. (1994) A SCANNING ELECTRON-MICROSCOPE BASED MICROINDENTATION SYSTEM. REVIEW OF SCIENTIFIC INSTRUMENTS, 65 (3). pp. 632-638. ISSN 0034-6748Full text not available from this repository.
The design and characterization of a scanning electron microscope based microindentor is presented. Dynamic, high magnification imaging of the indentor-specimen contact zone is possible, permitting observation of indent events. Applied load as a function of indentor tip displacement is continuously monitored during indentation. The maximum applied load capability of 20 N is measured to a resolution of 1 mN with a piezoelectric transducer mounted on the indentor shaft. Displacement is measured with a specially developed capacitance gauge that is again mounted on the indentor shaft near the indentor tip and records tip displacement with respect to the specimen surface to a resolution of 10 nm over a 100 mum range. The instrument is vacuum compatible, capable of remote operation, has a short measurement loop, and a potentially high bandwidth response. Results from a fiber push-down test on a SiC fiber reinforced glass ceramic are reported to illustrate the capability of the instrument in performing measurements across the nanoindentation and microindentation ranges.
|Item Type:||Journal Article|
|Subjects:||Q Science > QC Physics|
|Journal or Publication Title:||REVIEW OF SCIENTIFIC INSTRUMENTS|
|Publisher:||AMER INST PHYSICS|
|Official Date:||March 1994|
|Number of Pages:||7|
|Page Range:||pp. 632-638|
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