UNSPECIFIED (1993) TUNNELING PROBES FOR METROLOGICAL APPLICATIONS USING A LONG-RANGE PROFILOMETER. REVIEW OF SCIENTIFIC INSTRUMENTS, 64 (11). pp. 3161-3168. ISSN 0034-6748

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Abstract

The construction of a long-range tunneling profilometer based on a ''Nanostep'' slideway is reported. This profilometer has potential capability of measuring surface profiles over a complete traverse of 50 mm horizontally and 15 mum vertically. Its characteristics have been investigated over both long and short scanning ranges. Results are presented of a series of repeat measurements over 1.4-mm traces on a gold-coated silicon wafer. A repeatability of better than 0.2 nm is obtained and surface features of a few nanometers have been resolved laterally. Anomalies in the characteristic of tunneling current with the bias voltage are discussed in terms of surface contaminants and physical contact between tip and sample. Some problems in the application of STM in nanometric metrology are also discussed.

Item Type:	Journal Article
Subjects:	Q Science > QC Physics
Journal or Publication Title:	REVIEW OF SCIENTIFIC INSTRUMENTS
Publisher:	AMER INST PHYSICS
ISSN:	0034-6748
Date:	November 1993
Volume:	64
Number:	11
Number of Pages:	8
Page Range:	pp. 3161-3168
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/20983

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