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THE DETERMINATION OF VALENCE-BAND DISCONTINUITIES IN SI/SI1-XGEX/SI HETEROJUNCTIONS BY CAPACITANCE-VOLTAGE TECHNIQUES

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UNSPECIFIED (1993) THE DETERMINATION OF VALENCE-BAND DISCONTINUITIES IN SI/SI1-XGEX/SI HETEROJUNCTIONS BY CAPACITANCE-VOLTAGE TECHNIQUES. JOURNAL OF APPLIED PHYSICS, 74 (3). pp. 1894-1899. ISSN 0021-8979

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Abstract

Capacitance-voltage (C-V) profiling has been used to measure the apparent carrier concentration profiles in Si/Si1-xGex/Si structures for a range of Ge Percentages. Using Kroemers analysis, good agreement has been found between theoretical valence band offsets and those determined from the experimental data. The validity of Kroemers analysis has been assessed in the presence of traps using a C-V simulation program. Under certain circumstances, large errors occur in the extracted valence band offset due to distortion of the apparent carrier concentration profile by traps. It is proposed that the experimental data presented here falls into a regime where minimal distortion is to be expected and is reflected by the accuracy of the extracted valence band offsets.

Item Type: Journal Article
Subjects: Q Science > QC Physics
Journal or Publication Title: JOURNAL OF APPLIED PHYSICS
Publisher: AMER INST PHYSICS
ISSN: 0021-8979
Date: 1 August 1993
Volume: 74
Number: 3
Number of Pages: 6
Page Range: pp. 1894-1899
Publication Status: Published
URI: http://wrap.warwick.ac.uk/id/eprint/21166

Data sourced from Thomson Reuters' Web of Knowledge

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