DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM
UNSPECIFIED. (1993) DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM. VACUUM, 44 (3-4). pp. 361-365. ISSN 0042-207XFull text not available from this repository.
An indium focused ion beam has been used to sputter- drill holes through foils of copper (5 mum thick) and aluminium (5-25 mum thick). The drilling process Is monitored by observing the sample absorbed current and/or the transmitted current collected by a Faraday cup placed underneath the foil. The size of the exit aperture can be controlled by blanking the beam at a pre-determined time following penetration. Copper is penetrated about twice as quickly as aluminium. Exit apertures having areas as small as 0.054 mum2, corresponding to about 1 s of post-penetration drilling and to a drop of about 30 pA in absorbed current, have been fabricated in 5 mum thick aluminium foil. Penetration times increase rapidly for aluminium foils thicker than 10 mum.
|Item Type:||Journal Article|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
|Journal or Publication Title:||VACUUM|
|Publisher:||PERGAMON-ELSEVIER SCIENCE LTD|
|Official Date:||March 1993|
|Number of Pages:||5|
|Page Range:||pp. 361-365|
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