UNSPECIFIED (1993) DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM. VACUUM, 44 (3-4). pp. 361-365. ISSN 0042-207X

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Abstract

An indium focused ion beam has been used to sputter- drill holes through foils of copper (5 mum thick) and aluminium (5-25 mum thick). The drilling process Is monitored by observing the sample absorbed current and/or the transmitted current collected by a Faraday cup placed underneath the foil. The size of the exit aperture can be controlled by blanking the beam at a pre-determined time following penetration. Copper is penetrated about twice as quickly as aluminium. Exit apertures having areas as small as 0.054 mum2, corresponding to about 1 s of post-penetration drilling and to a drop of about 30 pA in absorbed current, have been fabricated in 5 mum thick aluminium foil. Penetration times increase rapidly for aluminium foils thicker than 10 mum.

Item Type:	Journal Article
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics
Journal or Publication Title:	VACUUM
Publisher:	PERGAMON-ELSEVIER SCIENCE LTD
ISSN:	0042-207X
Date:	March 1993
Volume:	44
Number:	3-4
Number of Pages:	5
Page Range:	pp. 361-365
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/21410

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