UNSPECIFIED. (1991) THE DIELECTRIC-PROPERTIES OF GLASS-CERAMIC-ON-METAL SUBSTRATES FOR MICROELECTRONICS PACKAGING. JOURNAL OF MATERIALS SCIENCE, 26 (19). pp. 5367-5374. ISSN 0022-2461

Abstract

The dielectric properties of some glass-ceramic-on-metal substrates have been determined over the frequency range 500 Hz to 5 MHz using a.c. bridge techniques. The substrates consisted of cordierite-based glass-ceramics screen printed on molybdenum. For glass layers of thickness greater than 100-mu-m both the permittivity, epsilon' and the dielectric loss, epsilon", are frequency independent over this frequency range at room temperature giving the value of epsilon' = 6.5 and tan-delta = 8 x 10(-3); the room-temperature data are consistent with the universal law of dielectric response. The variation of permittivity with temperature has also been examined and, below 120-degrees-C, the temperature coefficient [(epsilon' - 1) (epsilon' + 2)]-1 (partial derivative-epsilon'/partial derivative T)p, was found to be 1.3 x 10(-5) K-1. The results are compared with those previously reported for Al2O3 and AIN substrates.

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